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Chip Coplanarity Measuring Machine

L-Series Chip Coplanarity Measuring Machine

The L-series chip coplanarity measuring machine integrates micron-level high-precision 3D laser line scanning and visual image measurement functions. It is applied to micron-level coplanarity inspection for solder balls and pins of various packaged chips, including BGA solder ball coplanarity measurement and pin coplanarity measurement for SOP, QFP, TSSOP and other packages. It is also capable of measuring solder ball diameter, pin width and pitch, as well as the width, height, position and flatness of PCBs and mounted components.

Product Features

  • Combines micron-level high-precision line laser scanning and optical image measurement, achieving higher accuracy than conventional structured light measurement;
  • Generates high-resolution 3D point cloud diagrams directly, enabling height extraction at any arbitrary point;
  • Supports 2D optical measurement for accurate inspection of solder ball diameter, pin width and pin pitch;
  • Powerful software algorithm enables simple and rapid programming with instant measurement output after scanning;
  • Compatible with single-piece measurement and batch array measurement for workpieces placed in fixtures or Tray trays;
  • Self-developed gantry marble frame structure ensures ultra-high precision and long-term equipment stability;
  • Ergonomic all-in-one design ensures convenient and comfortable operation.

Software Features

  • Intuitive and user-friendly interface; one-click access to frequently used functions including measurement programming and operation control;
  • Supports the combined application of multiple sensors, including contact star probes, 3D line-scan lasers, point spectral confocal displacement sensors and line spectral confocal displacement sensors;
  • Built-in auto-focus, auto edge-finding and auto lighting adjustment functions. Combined with platform motion control, it realizes high-volume rapid measurement for products with identical specifications;
  • Supports auxiliary functions such as fast measurement via CAD file import, automatic code scanning and map navigation;
  • Enables measurement report export in multiple formats including Excel, PDF, Word and TXT, with a wide selection of configurable parameters;
  • Equipped with a comprehensive temperature compensation system, supporting two compensation modes: Temperature Mode and Proportion Mode, enabling rapid accuracy correction for diverse application scenarios.

Model Specification

Parameter Item
V400LS
Machine Dimension (L×W×H) (mm)
1100×1000×1800
XY-Axis Laser Measuring Range (mm)
400×300
XY-Axis Vision Measuring Range (mm)
300×300
Net Weight (kg)
900

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